ڹҶϵ绰Ѿ˯ȫޣʼʰԼǡ
ܸ㵽ӼôͿԳʹôԼ۲еġ̹̳
뽨̹ɲֻҪӼ
˵ʮڣʵͨСӼļ۸ҪáȽӼʿLHCӼʽҪϰ
Ҫ֪ASML˾װ20Ƴ̵DUV̻۸Ҳҡ
̹ϰڣڸֲȷԡ
̻ʮڣȶоƬ
һԱȾ֪Ϊʲôǰû뵽ˡ
̳ûвο飬൱ʯͷӣвͻǣͶʽȫˮƯ
Ҹ㶨ӼֻǵһڶҪȶ㹻ĵܹӦάӼת˵⣬ҪǹݺɢԴȶԡԼɿԵ⡣
ҵEUV̻ƹ̹ĸԶҲ
һߡ
˿Ƽ˾ܲ
ĬĬҪ豸ذ칫Ǣ̸̽豸˵˳
ιüͷһ壬лϻӷɢ豸Ӧǿ̣Ͳµ˳Ҫʲô
ײ˹ֱףֱѯʵлϻͷӷɢ豸ѵҪ˹̽
̽ȻùͣоƬҪһ豸䷽˲ŶȫоƬϷϵһ
˵뵼ƬƵȼ20ô̽Ƶȼ100
ļλܣǹ˾Ȼ漰оƬ˭֪͵͵˶ҵ
ң
ֻͰоƬ
ܹоƬǹڳ̲ӭ졣
ҪоƬ뵼Ƭ̽ҪDzܲȥ˽⡣
䷽𣿡
Ƹֱס
˵̽豸ʱ˲뵽˿ƼҲв֣ھȱ豸
λɻؿǣǶ֪𰸡
Ȼ
ǵһЦԺʿ˼λӦרҸңĿǰĻθ㵽豸һ⡣
²˦̡
˫ԺԺʿʶ̽˲źܺɣ
̽˲ţ֪䷽ܺɣ
ιǡײ˹Ƿȥ֤
ųǰ̵ţλҲٸкˣϾǿԺʿ
Ժʿҡ˵Ļ
˭ԣ
ιdzĬ˰Σ漴ڵϵİûԸЩ豸һͷʣʱҪһ㡣
̽豸һ㶼ǽڣڵ豸Ԥڱͳټ϶ƣ˭Ҳ֪ʲôʱԸ㵽
Ǿ鷳ˡ
ҲżоܸҲ˵ˣDZй̽
Ŀǰ֮12뵼Ƭ
Ҳ豸
ײ˹Ҳһ¶ĨЦݵҿܲڹ㣬DZߵûô
ƽ
ƣ
ڳˣͬǺιǶˣ棿
˶ڼײ˹ڷʽ
һ˵һ
뵼豸ijDz豸
ǹ̽ǰ뵼Ƭ豸ֶ絺¹
ǸվĶ棬ֻӰţԹԵظҵޡ
ˣҵأ
ҵҹҵʲô£
ҵ
ҲΪ뵽Ŀܣײ˹Żֻг
ǮߣڹǿҸЭ飬ùҵ豸ܿǮȥ˰ɣ
ؼǣDZȻȴ豸ǹڸûоƬ
üһײ˹Ƕģͨ
ֱײ˹żԹ˵㲻ֵһ
˵
ιǰһѹԱҵȥ͵͵˻عڣܽȱ豸⡣
νҪһڿڳԣ·Ҫһߡ
İ뵼ҵȱ豸ȱ˲š
Ƚ豸⣬˲ŷ滹ǿġ
ǿײ˹Ĩ壬֡ķҵҵܴ
˹̽豸뵼Ƭô
ƽѯʡ
оƬɲֹ̽뵼ƬҲ֮ء
䣬˳˵뵼Ƭ棬輯DZӦÿԸ㶨ɣ12ûУ6810NƷʰ뵼Ƭǻеġ
еġ
ȻģҲûѻ輯Ž̸ҲԲá
ʹ68İ뵼ƬоƬɱӣҵԸӼҵĵǣӻ輯ŵĶӦ
ڻ輯šоʶڰӣûбץѱʵDzǵġ
뵽飬벻
輯Բ6硢8뵼ƬҲʲôܣDzܲע⡣
68뵼ƬûʲôгͻȻǾ˵һ⣬ȷʵоʴоƬ
̾˿¶ĨɫǾ˵dzҪ̽⣬Ҫȥ뵼Ƭ⣿
Ӧˡ
ײ˹Ҳ¶Ĩɫ
ʱιվ˳뵼ƬʵͶʼҵ
ײ˹һ
üһ
涼ֻﶼ͵͵оƬҵǰɣ
Ҳܹǣ˭{ͨ˾۸ˣϲǼۣŪһֻҵܿأ
оƬDZƵġ
ʵɡ
Ҷ˵ˣƽҲˣ̹Ȼ̳Ҳа뵼Ƭ֣ѾԶ6Ƭ
Ҳһ
ι¶Ĩ˵
ھǣ뵼Ƭˣƿˣû뵽Լͬô
һ豸
Ͷʰ뵼ƬҵѾʵ6Ƭ
ڸֱ
ֻ볧֮䣬δҲ̫˰ɡ
Ȼû̳꣬һλϴʼ˳˵ˣˣ̹ͬԵ̨ƽDUV̻48Ƴ̵ġ
ιǣ
ײ˹
ƽ
ƽĹ̻ˣڸԼƶǫ̃˵ˡ
dzԾͬʱæѯʵҲ˵ԼĹ̻ģ
ݸǡ
ԥش
ƽһԼĺû뵽¸صıһ
˴˱˴ˡ
ЦǺǵ
̳Ȼһ˾ƷƣƽͳִƴȨ
û뵽ƽ˰뵼ƬƽҲû뵽͵͵ƽһ̨48Ƴ̵Ĺ̻
Ŀȫ̵ƣЩңͻȻײ˹ƽİ
Ѱ˼ûȥоƬڣ
۳ǣЩֹסϢʵ̫ʱˡ
Լйֻ̻48Ƴ̵ģ˵Ҳöع⼼Բ28ĿоƬ
28оƬάX1ֻô룿
ǿ϶룬̤˭ģ
оʴɴúʦȥ飬Ϳϴɣڰ˿Ƽ14۴оƬ
̻ܹؼ
ײ˹ʣʵ28ĿоƬ48̻𣿡
Ҫƣ
ι顣
Ƕ֪ع⼼Ϊ48ֻ̻48оƬ
˶ͳơˣҲӦع⼼Խ⣬48Ƴ̹̻ϣ12оƬ
ȿȡȿȿȡ
Ʋˮ仰Ǻˡ
48Ƴ̹̻12оƬ
ιǡײ˹ƽ˶¶Ĩɻæʵô
48Ƴ̵DUV̻ĿǰѾ̭ƲҲſ˲٣㵽һ̨ƽ⡣
ƽ˼Ҳܵδѡ
ȫƲоƬ͵͵ƽһ̨̻Էʱ֮衣
˵ܲ12оƬ
̨48Ƴ̵Ĺ̻ڳڷƽ𣬴Ǽˣ
ع⼼
ǵ˵֡
¸ǣûԲʾҲ֪ʲôԭ
ع⣿
ʲôǶع⣿
ܣѵ˿Ƽй˲ţ
ڼɻʱι¶ĨȻ飬ԭˣֲоܸǴ14оƬԭνĶع⼼
ԭEUV̻ײ˹㶣ΪоEUV̻ء
֮ǰʵڲ£˭˿Ƽ˾14۴оƬ
оʣ
ûEUV̻
ûEUV̻ô14оƬ
ڣ
ˮʯˣ
ҵٴʵüֲ豸ϵIJ㡣
һơĽ̸ÿλܶջ࣬ر̳ij
ʶľǶôȷδѾǿδij˲Լչ
뵼Ƭˣ̽û˿Ƽưɣøɼλʦ48̻ܲܲ28ĿоƬ
ѾȲ뿴Լ̻оƬ
Բ28оƬľǴͷȻֱһ壡
Ȼ˿ڣ¶ĨЦ⣬˵Ҫоʣ߾˻ع⼼
ƣ
úúã
úúúúúã
Ѱ˼
ûоƬ
ˣƬĸƬ豸ĸ豸̻ĸ̻иع⼼ͻƹ̻Ƶģ
ôȥ˸ֱҵ
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ܸ㵽ӼôͿԳʹôԼ۲еġ̹̳
뽨̹ɲֻҪӼ
˵ʮڣʵͨСӼļ۸ҪáȽӼʿLHCӼʽҪϰ
Ҫ֪ASML˾װ20Ƴ̵DUV̻۸Ҳҡ
̹ϰڣڸֲȷԡ
̻ʮڣȶоƬ
һԱȾ֪Ϊʲôǰû뵽ˡ
̳ûвο飬൱ʯͷӣвͻǣͶʽȫˮƯ
Ҹ㶨ӼֻǵһڶҪȶ㹻ĵܹӦάӼת˵⣬ҪǹݺɢԴȶԡԼɿԵ⡣
ҵEUV̻ƹ̹ĸԶҲ
һߡ
˿Ƽ˾ܲ
ĬĬҪ豸ذ칫Ǣ̸̽豸˵˳
ιüͷһ壬лϻӷɢ豸Ӧǿ̣Ͳµ˳Ҫʲô
ײ˹ֱףֱѯʵлϻͷӷɢ豸ѵҪ˹̽
̽ȻùͣоƬҪһ豸䷽˲ŶȫоƬϷϵһ
˵뵼ƬƵȼ20ô̽Ƶȼ100
ļλܣǹ˾Ȼ漰оƬ˭֪͵͵˶ҵ
ң
ֻͰоƬ
ܹоƬǹڳ̲ӭ졣
ҪоƬ뵼Ƭ̽ҪDzܲȥ˽⡣
䷽𣿡
Ƹֱס
˵̽豸ʱ˲뵽˿ƼҲв֣ھȱ豸
λɻؿǣǶ֪𰸡
Ȼ
ǵһЦԺʿ˼λӦרҸңĿǰĻθ㵽豸һ⡣
²˦̡
˫ԺԺʿʶ̽˲źܺɣ
̽˲ţ֪䷽ܺɣ
ιǡײ˹Ƿȥ֤
ųǰ̵ţλҲٸкˣϾǿԺʿ
Ժʿҡ˵Ļ
˭ԣ
ιdzĬ˰Σ漴ڵϵİûԸЩ豸һͷʣʱҪһ㡣
̽豸һ㶼ǽڣڵ豸Ԥڱͳټ϶ƣ˭Ҳ֪ʲôʱԸ㵽
Ǿ鷳ˡ
ҲżоܸҲ˵ˣDZй̽
Ŀǰ֮12뵼Ƭ
Ҳ豸
ײ˹Ҳһ¶ĨЦݵҿܲڹ㣬DZߵûô
ƽ
ƣ
ڳˣͬǺιǶˣ棿
˶ڼײ˹ڷʽ
һ˵һ
뵼豸ijDz豸
ǹ̽ǰ뵼Ƭ豸ֶ絺¹
ǸվĶ棬ֻӰţԹԵظҵޡ
ˣҵأ
ҵҹҵʲô£
ҵ
ҲΪ뵽Ŀܣײ˹Żֻг
ǮߣڹǿҸЭ飬ùҵ豸ܿǮȥ˰ɣ
ؼǣDZȻȴ豸ǹڸûоƬ
üһײ˹Ƕģͨ
ֱײ˹żԹ˵㲻ֵһ
˵
ιǰһѹԱҵȥ͵͵˻عڣܽȱ豸⡣
νҪһڿڳԣ·Ҫһߡ
İ뵼ҵȱ豸ȱ˲š
Ƚ豸⣬˲ŷ滹ǿġ
ǿײ˹Ĩ壬֡ķҵҵܴ
˹̽豸뵼Ƭô
ƽѯʡ
оƬɲֹ̽뵼ƬҲ֮ء
䣬˳˵뵼Ƭ棬輯DZӦÿԸ㶨ɣ12ûУ6810NƷʰ뵼Ƭǻеġ
еġ
ȻģҲûѻ輯Ž̸ҲԲá
ʹ68İ뵼ƬоƬɱӣҵԸӼҵĵǣӻ輯ŵĶӦ
ڻ輯šоʶڰӣûбץѱʵDzǵġ
뵽飬벻
輯Բ6硢8뵼ƬҲʲôܣDzܲע⡣
68뵼ƬûʲôгͻȻǾ˵һ⣬ȷʵоʴоƬ
̾˿¶ĨɫǾ˵dzҪ̽⣬Ҫȥ뵼Ƭ⣿
Ӧˡ
ײ˹Ҳ¶Ĩɫ
ʱιվ˳뵼ƬʵͶʼҵ
ײ˹һ
üһ
涼ֻﶼ͵͵оƬҵǰɣ
Ҳܹǣ˭{ͨ˾۸ˣϲǼۣŪһֻҵܿأ
оƬDZƵġ
ʵɡ
Ҷ˵ˣƽҲˣ̹Ȼ̳Ҳа뵼Ƭ֣ѾԶ6Ƭ
Ҳһ
ι¶Ĩ˵
ھǣ뵼Ƭˣƿˣû뵽Լͬô
һ豸
Ͷʰ뵼ƬҵѾʵ6Ƭ
ڸֱ
ֻ볧֮䣬δҲ̫˰ɡ
Ȼû̳꣬һλϴʼ˳˵ˣˣ̹ͬԵ̨ƽDUV̻48Ƴ̵ġ
ιǣ
ײ˹
ƽ
ƽĹ̻ˣڸԼƶǫ̃˵ˡ
dzԾͬʱæѯʵҲ˵ԼĹ̻ģ
ݸǡ
ԥش
ƽһԼĺû뵽¸صıһ
˴˱˴ˡ
ЦǺǵ
̳Ȼһ˾ƷƣƽͳִƴȨ
û뵽ƽ˰뵼ƬƽҲû뵽͵͵ƽһ̨48Ƴ̵Ĺ̻
Ŀȫ̵ƣЩңͻȻײ˹ƽİ
Ѱ˼ûȥоƬڣ
۳ǣЩֹסϢʵ̫ʱˡ
Լйֻ̻48Ƴ̵ģ˵Ҳöع⼼Բ28ĿоƬ
28оƬάX1ֻô룿
ǿ϶룬̤˭ģ
оʴɴúʦȥ飬Ϳϴɣڰ˿Ƽ14۴оƬ
̻ܹؼ
ײ˹ʣʵ28ĿоƬ48̻𣿡
Ҫƣ
ι顣
Ƕ֪ع⼼Ϊ48ֻ̻48оƬ
˶ͳơˣҲӦع⼼Խ⣬48Ƴ̹̻ϣ12оƬ
ȿȡȿȿȡ
Ʋˮ仰Ǻˡ
48Ƴ̹̻12оƬ
ιǡײ˹ƽ˶¶Ĩɻæʵô
48Ƴ̵DUV̻ĿǰѾ̭ƲҲſ˲٣㵽һ̨ƽ⡣
ƽ˼Ҳܵδѡ
ȫƲоƬ͵͵ƽһ̨̻Էʱ֮衣
˵ܲ12оƬ
̨48Ƴ̵Ĺ̻ڳڷƽ𣬴Ǽˣ
ع⼼
ǵ˵֡
¸ǣûԲʾҲ֪ʲôԭ
ع⣿
ʲôǶع⣿
ܣѵ˿Ƽй˲ţ
ڼɻʱι¶ĨȻ飬ԭˣֲоܸǴ14оƬԭνĶع⼼
ԭEUV̻ײ˹㶣ΪоEUV̻ء
֮ǰʵڲ£˭˿Ƽ˾14۴оƬ
оʣ
ûEUV̻
ûEUV̻ô14оƬ
ڣ
ˮʯˣ
ҵٴʵüֲ豸ϵIJ㡣
һơĽ̸ÿλܶջ࣬ر̳ij
ʶľǶôȷδѾǿδij˲Լչ
뵼Ƭˣ̽û˿Ƽưɣøɼλʦ48̻ܲܲ28ĿоƬ
ѾȲ뿴Լ̻оƬ
Բ28оƬľǴͷȻֱһ壡
Ȼ˿ڣ¶ĨЦ⣬˵Ҫоʣ߾˻ع⼼
ƣ
úúã
úúúúúã
Ѱ˼
ûоƬ
ˣƬĸƬ豸ĸ豸̻ĸ̻иع⼼ͻƹ̻Ƶģ
ôȥ˸ֱҵ
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