в豸ԼλԺʿ£оƬ̹쳣Ѹ١
ƬƬǰҪϴ裬ȥĻҳȾ
ʪϴһ飬ȥˮϴ谷ѬʹƬȫˮ
ֻоϴ裬һѬ裬ð뵼Ƭﵽ11NȣҲǹǰĹؼ
ĶѧʱѧϽ
зǿɸа͵
ѬԺ뵼Ƭ봫ͻ̻ڲ
Ҳ绻˵һĤ棬豸Ϳ豸ʼԶΪƬͿбԵ
оƬ·ΪϴͿ濾ع⡢PEB濾ͼܽȡ
ΪҪʹáع⼼軹Ҫظһ飬̶ȴ
ҲˣѲ
ô˵ҲǸɫƷʹ˲ѧģǡ״ӡ
һСʱ12뵼ƬѾȫ·ͼȴƬװ
ʹרҵ豸ָƬһλоƬѧʹüԡ
Ƭ̺
ɫһ䣬æǰʦЩ뵼Ƭƺе㲻Ծ
ʲô
ɴۡ
ûйܱŵѧǻǵ豸鿴ֵʱס룬˼
찡ͬ裬ΪʲôоƬĹϽȴˣǣ㾿뵼Ƭʲô
û뵽
˶ûԤϵ
Ƭ11Nȣ12뵼ƬЧǵ߸֪ͼ
˿ŵ˵ҪǴȥоƬIJȫ⣬˳Ĵ硣
ʷǰ
ңңȣ
һĿ⿴Χļʿij²ܴȥͶҷϣ©ֹֻ˶ʿѧˡ
вв
û취¹شûиǰ֪һϢ
һ֪ҵѾ12뵼Ƭ죬ijֲ֪оƬܽһԿ϶Ƿ꣬ɸꡣ
ʦ
ģͺϵġ
ԶԶԣ
ʿѧæ֤DZҵѣҪǻԺʿסĻȻȻģѧ֮·ߵͷˡ
š
˵ͷ˵ɣװɣҪͳƵƬƷʡ
һߡ
ħ̬
λоʹʦ˿ڿΪֻм֪ΪʲôŽҲܷſ档
ʮλءʦλдġ
һСʱȥԼкʦֲԾСҵͬ
ֵûз֣Щȵվ˻Ҫȡ
ʵһλʦ˶٣æӦȷʵе㷴
ƽʱǿûʲôɫȴ飬úúúһ
ᡭ
ǻᣬӦˣ
һȥһˣ
͵͵뿪ÿץУӦö˼ɣ
֪ô
λʦıһҲʼɫȥӣһλǼٽϲ忪
ΪסȺءѾǺ˶پƣֱߣ϶ɲˣԴȴѡ
ʦݣû߳ͱ¶ϣæ˹̹Ҫȥģɲѽ
˹̹ס룬תװĵѾٺˣҪؼϢ
ȥƵꣿ
ˣһǻؼϢɣͲ鷳ˡ
ɲ˵κ״̬ôԷһ˻ؼңԿȥô
Խ˹̹Խ⡣
ҲװˣżɽȻǿҪɣһع˾һˣзļˡ
¡
˲䱻
ûиϢܻڿɲ˹̹ȥ
ξδմǷֹʦҪߵġ
㿴ɫ
»δ䣬˹̹ҡͷ˵ǷļҪȻҪңDzףǾһع˾ɡ
뱻Щˣоʵ͵͵оƬģײһŬΪĭ
⸱ģ˹̹Ѿȷ쳣Ҳȱ̬Լֱǰ뿪
סæڹƵĸ棬ԣ˲ˡ
ȥ
ȥ
ʱ䡣
ǴDZ
ʦҲײ쳣˲䣬߲߶ȥ
β绰ȴٳûнܻڽྻоƬ
ˣ
ô죿
䵱˾æѯʡ
ĿĨɫֻļˣٶȸϻDZߣʲô𡣡
˿Ƽ˾еŵȹ˶ŬоʾԲϺȡ
Ҳ˲߶ʮһˣһžֱ쭳ʱ֡
ʮӡ
ȵִ
ȻǰŸ߽һӵʱ䣬ݲٵһλʦ͵ִ˹
ˣϢ·ͻȻ˹̹˻鿴
һǰһ
ſڵ¼ͼͻȻ֣æǰɱֱҰƿ
ƻˣǸ˿ƼоƬĶɣ
ͼߡ
ʦ˸ҵʱASML˾Ϳǹ
һסٴǰҪȴƷڵأȫһġ
ССĹʦȫǧֵ˾ܷоʵһݡ
û취
豸˼סˡ
½½ʮλʦִȫֱڣ˳
Ϊȶ࣬ˤΣʮDZɾͱͼϽŲ
ߵôѵǹ𣿡
ͼԴζ
ҡҡԴѾƣƾͷֻ뵹ͷ˯־˯
˿ƼܶסѹƳ12뵼ƬҲҶǰ氤оʸΪʲôУ
¶ĵҧ⣬һɴʹ˲ѣվҡһļԣ豸ǹˡ
Ŷ
ͼЦһ˵Ȼˣһͬȥ豸ɡ
⣬ҲΣֻһ߽ͬ
ͼɫѿѾ϶о˽ʹ˹ֻ̻ҪϱܲоƬ֮վͽˡ
߽¼䣬÷̻ྻҸǿ̣ʱ롣
һˣ
豸ڶϵ״̬
ô
ͼ治Լ۾߽ȥ豸
̻û¶ȡ
Ҳûм١
豸ʷݣͬʾʱû
ĬĬ˳ྻңصóֻ֪ͨϢ
ԭ߽ʱ߸պƬװʰóء
ͼʱһλѧڼң˻沢ȥ档
֪Ϣѧǽߣֱİ칫ҡ
ºݵӣ˳
ҲҺǶ죬ӽֻƬ뵼Ƭ豸ʱ¶ȺܿȴˣͼҲûз쳣
ʮλʦͼûҵ˿Ҳ߽ྻңѰ©ĵط
о̫ˣDzòص顣
ɼһȦ֣̻ȷʵûԭҲûжʧ谷嶼ûм١
⡭
ΪһͼҪҸĽͣڵӣûаļ
ܣܱҽԺˣղŲأͼ湤ʦƵڵأĵͷ
һλæ档
˵ʱʹ˸ɫúӦԭϷȫס
ÿԽ˻ᣬASML˾ʩѹһʮλء
ͼɫ˲ɷףʦҲˣסԺҪҪô
ҽ͡ͼͣߵýˣһ˵ҪϢϲ飬Ǿͼɡ
˸ɺصԼ칫ҡ
Ϊǧڼţİ칫ϢģҲû˻ỳذ칫ҵĶ
صԼܰ칫ңţķǸæϲ
ˣ˿ƼƬ뵼ƬƷ11%ﵽ97%ƬܻС½1W10%ǰδеĸ뵼Ƭ
ʲô
ɤѯʡ
ͺȶˣ˶
97%ƷʣоƬܻͨƬϼ¡
꣡
˸ƣ˵ģѾˣоƬܲǸǶ
Ҳ²⡭
뵼Ƭϣ
ݣ
ƾѾͷɤӵ¹յİ뵼ƬСţơ
ͨ
ţֻһ룬ͳܲסڵϺ˯ﻹ߶ţ
¹չƬ
ҪһƬԣҪһǧҪҪһҪ
ȶСĿ꣬1סskjvvx;ֻĶַskjvvx
ƬƬǰҪϴ裬ȥĻҳȾ
ʪϴһ飬ȥˮϴ谷ѬʹƬȫˮ
ֻоϴ裬һѬ裬ð뵼Ƭﵽ11NȣҲǹǰĹؼ
ĶѧʱѧϽ
зǿɸа͵
ѬԺ뵼Ƭ봫ͻ̻ڲ
Ҳ绻˵һĤ棬豸Ϳ豸ʼԶΪƬͿбԵ
оƬ·ΪϴͿ濾ع⡢PEB濾ͼܽȡ
ΪҪʹáع⼼軹Ҫظһ飬̶ȴ
ҲˣѲ
ô˵ҲǸɫƷʹ˲ѧģǡ״ӡ
һСʱ12뵼ƬѾȫ·ͼȴƬװ
ʹרҵ豸ָƬһλоƬѧʹüԡ
Ƭ̺
ɫһ䣬æǰʦЩ뵼Ƭƺе㲻Ծ
ʲô
ɴۡ
ûйܱŵѧǻǵ豸鿴ֵʱס룬˼
찡ͬ裬ΪʲôоƬĹϽȴˣǣ㾿뵼Ƭʲô
û뵽
˶ûԤϵ
Ƭ11Nȣ12뵼ƬЧǵ߸֪ͼ
˿ŵ˵ҪǴȥоƬIJȫ⣬˳Ĵ硣
ʷǰ
ңңȣ
һĿ⿴Χļʿij²ܴȥͶҷϣ©ֹֻ˶ʿѧˡ
вв
û취¹شûиǰ֪һϢ
һ֪ҵѾ12뵼Ƭ죬ijֲ֪оƬܽһԿ϶Ƿ꣬ɸꡣ
ʦ
ģͺϵġ
ԶԶԣ
ʿѧæ֤DZҵѣҪǻԺʿסĻȻȻģѧ֮·ߵͷˡ
š
˵ͷ˵ɣװɣҪͳƵƬƷʡ
һߡ
ħ̬
λоʹʦ˿ڿΪֻм֪ΪʲôŽҲܷſ档
ʮλءʦλдġ
һСʱȥԼкʦֲԾСҵͬ
ֵûз֣Щȵվ˻Ҫȡ
ʵһλʦ˶٣æӦȷʵе㷴
ƽʱǿûʲôɫȴ飬úúúһ
ᡭ
ǻᣬӦˣ
һȥһˣ
͵͵뿪ÿץУӦö˼ɣ
֪ô
λʦıһҲʼɫȥӣһλǼٽϲ忪
ΪסȺءѾǺ˶پƣֱߣ϶ɲˣԴȴѡ
ʦݣû߳ͱ¶ϣæ˹̹Ҫȥģɲѽ
˹̹ס룬תװĵѾٺˣҪؼϢ
ȥƵꣿ
ˣһǻؼϢɣͲ鷳ˡ
ɲ˵κ״̬ôԷһ˻ؼңԿȥô
Խ˹̹Խ⡣
ҲװˣżɽȻǿҪɣһع˾һˣзļˡ
¡
˲䱻
ûиϢܻڿɲ˹̹ȥ
ξδմǷֹʦҪߵġ
㿴ɫ
»δ䣬˹̹ҡͷ˵ǷļҪȻҪңDzףǾһع˾ɡ
뱻Щˣоʵ͵͵оƬģײһŬΪĭ
⸱ģ˹̹Ѿȷ쳣Ҳȱ̬Լֱǰ뿪
סæڹƵĸ棬ԣ˲ˡ
ȥ
ȥ
ʱ䡣
ǴDZ
ʦҲײ쳣˲䣬߲߶ȥ
β绰ȴٳûнܻڽྻоƬ
ˣ
ô죿
䵱˾æѯʡ
ĿĨɫֻļˣٶȸϻDZߣʲô𡣡
˿Ƽ˾еŵȹ˶ŬоʾԲϺȡ
Ҳ˲߶ʮһˣһžֱ쭳ʱ֡
ʮӡ
ȵִ
ȻǰŸ߽һӵʱ䣬ݲٵһλʦ͵ִ˹
ˣϢ·ͻȻ˹̹˻鿴
һǰһ
ſڵ¼ͼͻȻ֣æǰɱֱҰƿ
ƻˣǸ˿ƼоƬĶɣ
ͼߡ
ʦ˸ҵʱASML˾Ϳǹ
һסٴǰҪȴƷڵأȫһġ
ССĹʦȫǧֵ˾ܷоʵһݡ
û취
豸˼סˡ
½½ʮλʦִȫֱڣ˳
Ϊȶ࣬ˤΣʮDZɾͱͼϽŲ
ߵôѵǹ𣿡
ͼԴζ
ҡҡԴѾƣƾͷֻ뵹ͷ˯־˯
˿ƼܶסѹƳ12뵼ƬҲҶǰ氤оʸΪʲôУ
¶ĵҧ⣬һɴʹ˲ѣվҡһļԣ豸ǹˡ
Ŷ
ͼЦһ˵Ȼˣһͬȥ豸ɡ
⣬ҲΣֻһ߽ͬ
ͼɫѿѾ϶о˽ʹ˹ֻ̻ҪϱܲоƬ֮վͽˡ
߽¼䣬÷̻ྻҸǿ̣ʱ롣
һˣ
豸ڶϵ״̬
ô
ͼ治Լ۾߽ȥ豸
̻û¶ȡ
Ҳûм١
豸ʷݣͬʾʱû
ĬĬ˳ྻңصóֻ֪ͨϢ
ԭ߽ʱ߸պƬװʰóء
ͼʱһλѧڼң˻沢ȥ档
֪Ϣѧǽߣֱİ칫ҡ
ºݵӣ˳
ҲҺǶ죬ӽֻƬ뵼Ƭ豸ʱ¶ȺܿȴˣͼҲûз쳣
ʮλʦͼûҵ˿Ҳ߽ྻңѰ©ĵط
о̫ˣDzòص顣
ɼһȦ֣̻ȷʵûԭҲûжʧ谷嶼ûм١
⡭
ΪһͼҪҸĽͣڵӣûаļ
ܣܱҽԺˣղŲأͼ湤ʦƵڵأĵͷ
һλæ档
˵ʱʹ˸ɫúӦԭϷȫס
ÿԽ˻ᣬASML˾ʩѹһʮλء
ͼɫ˲ɷףʦҲˣסԺҪҪô
ҽ͡ͼͣߵýˣһ˵ҪϢϲ飬Ǿͼɡ
˸ɺصԼ칫ҡ
Ϊǧڼţİ칫ϢģҲû˻ỳذ칫ҵĶ
صԼܰ칫ңţķǸæϲ
ˣ˿ƼƬ뵼ƬƷ11%ﵽ97%ƬܻС½1W10%ǰδеĸ뵼Ƭ
ʲô
ɤѯʡ
ͺȶˣ˶
97%ƷʣоƬܻͨƬϼ¡
꣡
˸ƣ˵ģѾˣоƬܲǸǶ
Ҳ²⡭
뵼Ƭϣ
ݣ
ƾѾͷɤӵ¹յİ뵼ƬСţơ
ͨ
ţֻһ룬ͳܲסڵϺ˯ﻹ߶ţ
¹չƬ
ҪһƬԣҪһǧҪҪһҪ
ȶСĿ꣬1סskjvvx;ֻĶַskjvvx