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о뵼ôǮȥˣз̻֮⣬ҪľͶһЩ˾Ϊо뵼Ĺ̻㲿ͶǮЩ˾ֺõΪо뵼ƿ㲿
ҲЩͷʵ꣬о뵼Ƴ450Ĺ̻Ǿܡ˹GCAȳ̵Ĺ̻ж
ЩĬǹ̻ҵڵڣټϢʮӣǰӡŷޡձȵصĿƼѧܿһЩѯ˾ҵȣdzڶģȻ͵ڣö߿¸߹ܡԱĵġ
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̾˿˵հ뵼ҵ֮ǰƶҵĦɵķչĿǰо뵼зĹ̻ڵһ450̻
꣬ԲˣȫȽĵ248ɨͶӰʽ̻Сգ180130ƳоƬ
ٱΪ»ᲪȻŭϾо뵼ôǮȥзĹ̻ȴɸܵĹ̻γ˴ˮƯʲô
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ҲǣܡIBMӡGCA˹й̻ҵĹ˾ȽļҲǵ̻
193ײĵĴ̻ڻûй˾ܹ𣿡꿴˵
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˵ЩֱҡͷҼҶбľڶо뵼˵ôȽĹ̻ܡGCAIBMȹ˾Ĺ̻˵ǵǣĴ̻ȥδӡ
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꿴˵ڶڶо뵼˵˹Ĺ̻һIJࡣ
ٶȣDzһҪϣ϶ףܱԽ˦ԽԶ
Ĵ193Ĺ̻ȴͬǵһ㣬̻뵼ҵǰҵ鷳
ڣϼ꣬ԵĴ̻ͭǽڣΪ˹˵Ĵ̻Ϊڰ뵼ϴӢضñﲻסˡ
1997꣬Ӣض棬˵ӹɽȻðԴ棬һ֣AMDĦ˹Īɣʵң齨EUVLLCˣרŹ˵Ĵ̻ѹء
Ĵ̻˹ȹ˾ʱԽãڶо뵼ԽԳ⼸ʱ䣬̸˹IJ࣬ȻսĴ̻
Ƕо뵼壬Ϊ࣬ʵĻᣬʱ֮䣬һԭΪձ뵼壬ǰӵĸ
DZߣܣƴѹҹ˾Ϊ˲ϧְ˹ֻΪʰձ뵼ҵ
ͣͲǰӹ˲϶о뵼ʱʱƴѵҪȰʰתͷһо뵼壿
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Ȼо뵼ߣҲҪڰDZߣҼѣðDZߡо뵼Ķ֣ͬһӪģо뵼ڰﰢӰ뵼ҵ
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Ͷо뵼壬һ̻ôڶ̻ȫûͷʱ˵ʲôսĴ̻ҵڵ˵Щˡ
٣귴ļ֣ڹ̻DzУȴ֪δĴ̻ķչģ
κһҵѵʲôһ棬ҵҵߣηǰ·ãã˭Ҳ½ۣǿܼʮԪҵʽȥȴһգȻһĹ˾ʹ˵¡
ΪʲôҵôţΪǾҹһյƣԴҵǰСĴۣȡ棡
ֻҪȷչ̻δķȷĴûʽ̻EUV̻·ߣֻҪǮõ棡
о뵼⼸Ŀ꣬ǵĴ̻Ƴ450Ĺ̻еͶ˹̻г߶˹̻ͼ֮ڣֻҪռڹ̻гڶо뵼˵㹻ˣ
꣬ƺ϶о뵼壬ͻ뵼ҵĵĴ̻ɣ֪ģûס
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ԺʿƽDZߵĵоƬзʲôزһ죬оƬĿDZߵĽȡ
˳
оƬDZߣз൱ӢضһڴоƬѶУԹˣԤףԽеһƬ
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ԥһ£ٽڿʼϰ꣬о뵼ҪӺ豸㲿ҪǰҪĵ
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ܹŶDZߣз̻ҪзӦ㲿ȣΪͶ˳㲿˾Ϊо뵼̻㲿Ӧ̣
о뵼ôǮȥˣз̻֮⣬ҪľͶһЩ˾Ϊо뵼Ĺ̻㲿ͶǮЩ˾ֺõΪо뵼ƿ㲿
ҲЩͷʵ꣬о뵼Ƴ450Ĺ̻Ǿܡ˹GCAȳ̵Ĺ̻ж
ЩĬǹ̻ҵڵڣټϢʮӣǰӡŷޡձȵصĿƼѧܿһЩѯ˾ҵȣdzڶģȻ͵ڣö߿¸߹ܡԱĵġ
Զȫ̻ҵĸ֣ٸо뵼£൱˽ġ
̾˿˵հ뵼ҵ֮ǰƶҵĦɵķչĿǰо뵼зĹ̻ڵһ450̻
꣬ԲˣȫȽĵ248ɨͶӰʽ̻Сգ180130ƳоƬ
ٱΪ»ᲪȻŭϾо뵼ôǮȥзĹ̻ȴɸܵĹ̻γ˴ˮƯʲô
ٵĻȴûʲôŭ飬˿ĸоٲЩ졣
ҲǣܡIBMӡGCA˹й̻ҵĹ˾ȽļҲǵ̻
193ײĵĴ̻ڻûй˾ܹ𣿡꿴˵
ǣ
ЩֵĿһۣȷĴ𰸡
̻·ߣʮѾʽͻƣĴ̻뵼ҵѾ˺ܶ꣬ûͷ
Ϊ˰193ͻƵ157ףĿǰİ뵼ѧҵӼ⡢Ͷ䡢Ͷ䡢Xȶ
ЩУĿǰձ뵼DZӼַⷽ̽⣬ѶʮִЩûЧҲζ뵼ҵʮĦɡʽʧЧˣ
˵ЩֱҡͷҼҶбľڶо뵼˵ôȽĹ̻ܡGCAIBMȹ˾Ĺ̻˵ǵǣĴ̻ȥδӡ
Ƭ̣ʵΪĴ̻ܡ˹Щ˾ã
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ھܹͻƣҲҪԸʱ䣬ʮ궼һ
ҡͷ˵з£ʱȷʵҪģĿ̿ǰнܽȽͷҲҪ㣬һֽ̤·һȦ
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ֻҪĴ̻סܡ˹ʱ䣬㹻ˣ
⣬ӦܵĹ£ڶо뵼˵Ҫľ֮ڣϹ̻һݶӵij̣ȻսĴ̻
꿴˵ڶڶо뵼˵˹Ĺ̻һIJࡣ
ٶȣDzһҪϣ϶ףܱԽ˦ԽԶ
Ĵ193Ĺ̻ȴͬǵһ㣬̻뵼ҵǰҵ鷳
ڣϼ꣬ԵĴ̻ͭǽڣΪ˹˵Ĵ̻Ϊڰ뵼ϴӢضñﲻסˡ
1997꣬Ӣض棬˵ӹɽȻðԴ棬һ֣AMDĦ˹Īɣʵң齨EUVLLCˣרŹ˵Ĵ̻ѹء
Ĵ̻˹ȹ˾ʱԽãڶо뵼ԽԳ⼸ʱ䣬̸˹IJ࣬ȻսĴ̻
Ƕо뵼壬Ϊ࣬ʵĻᣬʱ֮䣬һԭΪձ뵼壬ǰӵĸ
DZߣܣƴѹҹ˾Ϊ˲ϧְ˹ֻΪʰձ뵼ҵ
ͣͲǰӹ˲϶о뵼ʱʱƴѵҪȰʰתͷһо뵼壿
ֻҪܻţо뵼Ӧûܹϼʮʱ䡣
Ȼо뵼ߣҲҪڰDZߣҼѣðDZߡо뵼Ķ֣ͬһӪģо뵼ڰﰢӰ뵼ҵ
սĴ̻
ٱĻһ⻰˵
Ͷо뵼壬һ̻ôڶ̻ȫûͷʱ˵ʲôսĴ̻ҵڵ˵Щˡ
٣귴ļ֣ڹ̻DzУȴ֪δĴ̻ķչģ
κһҵѵʲôһ棬ҵҵߣηǰ·ãã˭Ҳ½ۣǿܼʮԪҵʽȥȴһգȻһĹ˾ʹ˵¡
ΪʲôҵôţΪǾҹһյƣԴҵǰСĴۣȡ棡
ֻҪȷչ̻δķȷĴûʽ̻EUV̻·ߣֻҪǮõ棡
о뵼⼸Ŀ꣬ǵĴ̻Ƴ450Ĺ̻еͶ˹̻г߶˹̻ͼ֮ڣֻҪռڹ̻гڶо뵼˵㹻ˣ
꣬ƺ϶о뵼壬ͻ뵼ҵĵĴ̻ɣ֪ģûס
Ϊ꣬Ϊо뵼Ĺ̻Ŀƶ˼ƻҲֻܰ൱ŵļƻۿȥˡ
ԺʿƽDZߵĵоƬзʲôزһ죬оƬĿDZߵĽȡ
˳
оƬDZߣз൱ӢضһڴоƬѶУԹˣԤףԽеһƬ
Ц˵̻߹ϸǴĵоƬзŶӣзȾҪ첻ˡ
о뵼DZߣҪ齨רŵֻоƬŶӣ϶߿ܲͨżзߣһоƬ
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ҲҪãδӺҲҪʽ𣬿ԴӶ߿ܲ룡
ʲô
⻰ɫʱ䡣
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